We maintain a substantial inventory to uphold our commitment to superior quality and timely delivery for Aviza/SVG furnace systems of 200/300 mm processes.
Key spare parts
PCBs and Workstation
For obsoleted parts, repaired and overhauled PCB are available.
Motors and Controllers
New motors or reconditioned for 200/300 systems.
Spares and Services
Process related spares, seals, valves,… etc.