We maintain a substantial inventory to uphold our commitment to superior quality and timely delivery for Aviza/SVG furnace systems of 200/300 mm processes.

Motors

Kollmorgen CBU-Z (RVP300+)
Parker CBU-Z (RVP300)
Gripper (300mm)
RBU (200/300mm)

Controllers

Amplifer (200/300mm)
CBU X/Y/MIP (300mm)
CBU Z (300mm)
RBU Controller (200/300mm)